Objective lenses

Objective lenses

Objective lenses

SOC offers laser-resistive DUV objective lenses in which lenses with SOC's excellent AR coating are finely fabricated without adhesive. Its optimal application is a precision laser processing and defect detection optical system.

Applications

Laser processing machine, solar cell manufacturing and inspection system, semiconductor manufacturing and inspection system, LCD manufacturing and inspection system, etc.

Specification examples

Model No. Wavelength Focal length NA Processing area WD Window
KVH20-8 248~266nm/546nm 20mm 0.2 0.5mm 10.2mm Replaceable
KVH40-9.6 248~266nm/546nm 40mm 0.12 2mm 24mm Replaceable
KV100-25 248nm 100mm 0.125 2mm 70mm N/A
KV200-25 248nm 200mm 0.05 4mm 192mm N/A

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